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Our diaphragm-sealed valves are available in a wide variety of sizes, materials, and configurations to fill your needs for high-purity and ultrahigh-purity applications.
Diaphragm-sealed valves:
DL series and DS series diaphragm valves offer packless, all metal containment for high-purity and ultrahigh-purity applications up to 3500 psig (241 bar).
Working Pressure Up to 3500 psig (241 bar) Temperature –100 to 250°F (–73 to 121°C) Flow Coefficient Up to 0.30 Body Material 316L stainless steel Diaphragm Material 316 stainless steel End Connections Type Swagelok® tube fitting, VCR® face seal fitting, VCO® O-ring fitting, tube butt weld, tube socket weld Size 1/4, 3/8, and 1/2 in.; 6 and 8 mm
With flow coefficients up to 13 and a variety of body materials and configurations, LD series bulk gas diaphragm valves can support a wide range of ultrahigh-purity shutoff, bulk-gas distribution, and isolation applications.
Working Pressure Up to 300 psig (20.6 bar) Temperature –20 to 300° F (–28 to 148°C) Flow Coefficient Up to 13 Body Materials CF3M cast stainless steel, forged and bar stock 316L stainless steel Diaphragm Material 316L stainless steel End Connections Type Swagelok tube fitting, male VCR face seal fitting, female NPT, female ISO, tube extension Size 1/4 to 1 in.; 12 to 25 mm
With 316L VIM-VAR construction, DP series diaphragm-sealed valves are suitable for a variety of ultrahigh-purity applications.
Working Pressure Vacuum to 3045 psig (210 bar) Burst Pressure Up to 12 200 psig (840 bar) Actuation Pressure 60 to 120 psig (4.2 to 8.2 bar) Temperature –10 to 300°F (–23 to 150°C) Flow Coefficient 0.20 and 0.27 Body Materials 316L VIM-VAR stainless steel Diaphragm Material Cobalt-based superalloy End Connections Type Swagelok tube fitting, VCR face seal fitting, tube butt weld, modular surface-mount (MSM) Size 1/4 in.; 6 mm
DF series diaphragm valves are designed for a wide range of ultrahigh-purity, high-flow applications, with a flow coefficient of 0.62 and available with high-flow end connections.
Working Pressure Vacuum to 300 psig (20.6 bar) Burst Pressure 3200 psig (220 bar) Actuation Pressure 70 to 100 psig (4.9 to 6.8 bar) Temperature –10 to 270°F (–23 to 132°C) Flow Coefficient 0.62 Body Materials 316L VAR stainless steel Diaphragm Material Cobalt-based superalloy End Connections Type "H" type VCR® face seal fitting, VCR face seal fitting, tube butt weld Size 1/4, 3/8, 1/2 in.; 10 and 12 mm
ALD diaphragm valves offer ultrahigh cycle life, high-speed actuation, and flow coefficients up to 0.62, along with thermal actuators, position sensors, and solenoids for optimal performance in atomic layer deposition applications.
Working Pressure Vacuum to 145 psig (10.0 bar) Burst Pressure >3200 psig (220 bar) Actuation Pressure 50 to 90 psig (3.5 to 6.2 bar) Temperature 32 to 392°F (0 to 200°C) Flow Coefficient 0.27 or 0.62 Body Materials 316L VIM-VAR stainless steel Diaphragm Material Cobalt-based superalloy End Connections Type VCR face seal fitting, tube butt weld; modular surface mount (MSM) Size 1/4 to 1/2 in.; 6 to 12 mm; 1.125 and 1.5 in. MSM
Meeting SEMI Standard F57-0301 for UHP chemical distribution systems and equipment, the DRP series' ultrahigh-purity diaphragm enhanced design helps minimize entrapment areas and extend diaphragm life.
Pressure Rating Up to 100 psig (6.8 bar) Media Temperature 73 to 212°F (23 to 100°C) Flow Coefficient Up to 10.2 Body, Diaphragm Material Modified PTFE End Connections Type Fine thread flare and Nippon Pillar Super 300® standard; ISO, NPT, Flowell Size 1/4 to 1 1/4 in. and 6 to 25 mm Configuration 2- and 3-way manual and pneumatic shutoff; adjustable flow and bypass models
Swagelok thermal-immersion diaphragm valves offer high-speed actuation, flow coefficients up to 0.60, and are designed for optimum performance at 220°C (428°F) for high-temperature processes including atomic layer deposition (ALD) and precursor delivery applications. They are offered in both pneumatically actuated and manual models with a variety of 1/4 and 3/8 in. end connections.
Working Pressure Vacuum to 70 psig (4.8 bar) Burst Pressure > 3200 psig (220 bar) Actuation Pressure 60 to 90 psig (4.1 to 6.2 bar) Temperature 20 to 220°C (70 to 428°F) Flow Coefficient "H" type VCR® Connections 0.60 at 20°C (70°F) 0.40 at 220°C (428°F) VCR and all other connections
0.30 at 20°C (70°F)
0.21 at 220°C (428°F)
Modular surface-mount body0.25 at 20°C (70°F)
0.21 at 220°C (428°F)
Body Material 316L VIM-VAR stainless steel Diaphragm Material Cobalt-based superalloy End Connections Type VCR and "H" type VCR metal gasket face seal fittings, tube butt weld; modular surface mount (MSM) Size1/4 and 3/8 in.
1.125 and 1.5 in. MSM
The DR series radial diaphragm valve offers a cleaner, more compact way to manage sterile flow streams for many applications: media preparation, fermentation, harvest, separation, refining, purification, CIP, and SIP systems. The single-body biopharm valve design can be manufactured in a wide range of configurations to include multiple valves and multiple ports, and point-of-use valves.
Working Pressure Up to 150 psig (10.3 bar) Media Temperature Up to 280°F (137°C) Flow Coefficient 1.6 to 27.2 Body Material 316L stainless steel Diaphragm Material Modified PTFE Internal Surface Finish Electropolished and finished to 15 µin. (0.38 µm) avg Valve Sizes 1/2 to 2 in. End Connections Tube butt weld, TS series sanitary clamp, and Kwik-Clamp
DE series springless diaphragm valves are available with a variety of actuation options for ease of integration into your 1.125 in. C-seal or W-seal modular gas system.
Working Pressure Vacuum to 125 psig (8.6 bar) Burst Pressure >3200 psig (220 bar) Actuation Pressure Normally Closed 60 to 120 psig (4.1 to 8.2 bar) Normally Open and 60 to 90 psig (4.1 to 6.2 bar) Normally Closed with manual Integral lockout override Temperature 14 to 150°F (-10 to 65°C) Flow Coefficient 0.3 Body Materials 316L VIM-VAR stainless steel Diaphragm Material Cobalt-based superalloy End Connections Type 1.125 in. modular surface mount (MSM) Configurations 2-port and 3-port
